Projection optical system and projection exposure apparatus

ABSTRACT

In the projection optical system that projects an image of the first object onto the second object with a fixed reduction ratio and a projection aligner equipped therewith, said projection optical system comprises, viewed from said first object side, in order of succession, the first group of lenses with positive refractive power, and the second group of lenses virtually consists of afocal system, and the third group of lens with positive refractive power, and if the focal length of said projection optical system is represented by F, the projection magnification ratio of said projection optical system is represented by B, the distance between said first object and said second object is represented by L, the distance from said first object to the lens surface that is closest to said first group of lenses is represented by d 0 , the focal length of said first group of lenses is represented by f 1 , and the focal length of said third group of lenses is represented by f 3  herein, then the following conditions should be satisfied: 
     
         1.8≦|F/(B·L)| 
    
     
         d.sub.0 /L≦0.2 
    
     
         0.80≦f.sub.3 /f.sub.1 ≦1.5.

This is a Continuation of application Ser. No. 08/727,206 filed Apr. 30, 1996, now abandoned, which is a Continuation of application Ser. No. 08/152,490 filed Nov. 15, 1993, now abandoned.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention generally relates to projection optical systems as well as projection exposure apparatus for the purpose of reduction projection of patterns on the first object onto the second object such as a substrate, and particularly relates to projection optical systems as well as projection exposure apparatus which are ideal for projection alignment of integrated circuit patterns formed on a reticle (mask) as the first object onto a substrate (wafer) as the second object.

2. Related Background Art

As integrated circuit patterns become more refined, the performance required for projection optical systems used for wafer printing has become more rigorous. Under such a circumstance, in order to improve resolution of projection optical systems, it can be considered either to further shorten an exposure wavelength λ or to increase a numerical aperture NA of projection optical systems.

In recent years, in order to accommodate further refinement of print patterns, a light source to be used for exposure has become substituted from the one that emits g line (436 nm) exposure wavelength to mainly the one that emits i line (365 nm) exposure wavelength. Furthermore, a light source that emits light with shorter wavelength, such as excimer laser (248 nm, 193 nm), is about to be used.

And a projection optical system which performs projection alignment of a pattern on a reticle onto a wafer by use of each of the aforementioned exposure wavelengths is being proposed.

What is required for a projection optical system along with improving resolution is reduction of image distortion. What is termed as "image distortion" herein are, besides the distortion due to a projection optical system (distorted aberration), the one due to curvature of a wafer to be imaged thereon on the image side of a projection optical system and the one due to curvature of a reticule on the object side of the projection optical system on which IC patterns and such are described.

Therefore, in order to lessen an influence due to wafer curvature upon image distortion, so-called an image side telecentric optical system, which places an exit pupil on the image side of the projection optical system farther, has been used.

Meanwhile, with regard to reduction of image distortion due to reticle curvature, it has been considered to make the object side of the projection optical system a telecentric optical system, and thus it has been proposed to place an entrance pupil position of the projection optical system comparatively farther from the object. Some of such examples for are Patent Disclosure Showa #63-118115, Patent Disclosure Heisei #4-157412, and Patent Disclosure Heisei #5-173065.

The projection optical systems proposed in each of the above mentioned Patent public information, however, have small numerical apertures NA and do not have high resolution, or have narrow exposure areas. Also with regard to an entrance pupil position of the projection optical systems, it was simply placed comparatively farther from the object plane (reticle), and telecentricity on the object side (reticle side) and on the image side (wafer side) was not corrected adequately.

Also, although some of the projection optical systems proposed in the aforementioned Patent Information materialized telecentricity on the object side by increasing the distance from the object plane (reticle) to a first lens surface of the projection optical system, since the distance between the object and the image (the distance between the reticle and the wafer) has become extremely long compared to the exposure area, it has brought such a problem as growing of the size of the optical system per se.

The present invention was conducted in light of the above mentioned issues, and its objective is, while maintaining a comparatively large exposure area, to offer a compact projection optical system which has high-resolution and a large numerical aperture which obtains substantially small image distortion even in the case where the flatness of the first object (reticle) as well as the second object (wafer) is extremely bad, and to offer a projection exposure provided therewith.

SUMMARY OF THE INVENTION

In order to attain the above mentioned objective, a projection optical system according to an aspect of the present invention which projects an image of a first object with a reduced magnification onto a second object comprises, viewed from said first object side, in order of succession, a first group of lenses with positive refractive power, a second group of lenses virtually constituted by afocal systems, and a third group of lenses with positive refractive power, and

when a focal length of said projection optical system is represented by F, a projection magnification of said projection optical system is represented by B, a distance between said first object and said second object is represented by L, a distance from said first object to a lens surface closest to the first object in said first group of lenses is represented by d₀, a focal length of said first group of lenses is represented by f₁, and a focal length of said third group of lenses is represented by f₃, then it is constituted so as to satisfy the following conditions.

    1.8≦|F/(B·L)|

    d.sub.0 /L≦0.2

    0.80≦f.sub.3 /f.sub.1 ≦1.5

A projection exposure apparatus, according to an other aspect of the present invention, comprises an illumination means that illuminates the first object on which a fixed pattern is formed, a projection optical system which projects the image of said first object onto the second object, the first supporting means which supports said first object, the second supporting means which supports said second object, and

said projection optical system thereof comprises, viewed from said first object side, in order of succession, the first group of lenses with positive refractive power, the second group of lenses virtually constituted by afocal systems, and the third group of lenses with positive refractive power, and

when the focal length of said projection optical system is represented by F, the projection magnification of said projection optical system is represented by B, the distance from said first object to the lens surface closest to the first object in said first group of lenses is represented by d₀, the focal length of said first group of lenses is represented by f₁, and the focal length of said third group of lenses is represented by f₃, then, it is constituted so as to satisfy the following conditions.

    1.8≦|F/(B·L)|

    d.sub.0 /L≦0.2

    0.80≦f.sub.3 /f.sub.1 ≦1.5

Thus, according to the present invention, the projection optical system which corrects various aberrations well-proportionately despite of its compactness while maintaining a relatively large exposure area and furthermore has a high numerical aperture and high resolution can be attained. This will enable to materialize a projection aligner of high performance.

Also, because so-called a both sides telecentric optical system, which places an entrance pupil position of the projection optical system farther than the object plane (reticle plane) and the exit pupil position farther away from the image plane (wafer plane) can be materialized, it will be made possible to solve the problems regarding the image distortion due to curvature of the object plane and the image plane.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a conceptual drawing showing the projection optical system according to the present invention being telecentric on both sides.

FIG. 2 shows a basic structure of the projection optical system according to the present invention.

FIG. 3 depicts the way various aberrations are corrected well proportionately by the configuration as in FIG. 2.

FIG. 4 qualitatively shows the slope of a light path of a paraxial marginal ray when the height of the paraxial marginal ray passing through the lens surface show peak values, in a region closest to the object side (reticle side) where a variation of an angle of the slope of the paraxial marginal ray from an axial object point (reticle center) initially becomes small.

FIG. 5 qualitatively shows the movement of the light path of the paraxial marginal ray when the angle of the slope of the paraxial marginal ray is in its tendency to increase, in the region closest to the object side (reticle side) where the variation of the angle of the slope of the paraxial marginal ray from the axial object point (reticle center) initially becomes small.

FIG. 6 qualitatively shows the slope of the light path of the paraxial marginal ray when the height of the paraxial marginal ray passing through the lens surface shows a peak values, in the region closest to the image side (wafer side) where the variation of the angle of the slope of the paraxial marginal ray lastly becomes small.

FIG. 7 qualitatively shows the slope of the light path of the paraxial marginal ray when the angle of the slope of the paraxial marginal ray is in its tendency to decrease, in the region closest to the image side (wafer side) where the variation of the angle of the slope of the paraxial marginal ray initially becomes small.

FIG. 8 shows a schematic structure of the projection exposure apparatus when the projection optical system according to the present invention is applied thereto.

FIG. 9 shows the lens structure of the first embodiment according to the present invention.

FIG. 10 shows the lens structure of the second embodiment according to the present invention.

FIG. 11 shows the lens structure of the third embodiment according to the present invention.

DESCRIPTION OF THE PREFERRED EMBODIMENT

First of all, before embodiments according to the present invention are described, a basic configuration as well as various favorable conditions thereof will be described.

As appears from FIG. 1, normally, an aperture stop AS is installed at the pupil position of the projection optical system, and the entrance pupil position of the projection optical system can be found from a paraxial amount given by the paraxial ray as the image position by an optical system placed more on the object side (reticle side) than the aperture stop AS.

However, the entrance pupil position of the optical system generally varies according to a height of an object H (the height of the object from the optical axis). Therefore, the entrance pupil position of the projection optical system can be considered to be determined in accordance with an each of the height of the object H.

Meanwhile, the influence due to the curvature of the reticle on the object side of the projection optical system upon the image distortion is proportionate to telecentricity of incoming rays entering the projection optical system from the reticle T, i.e., a gradient of the chief ray of the incoming rays subtended by the optical axis of the projection optical system.

Here, if telecentricity of the incoming rays (chief ray) from the height H (the object height H) from the optical axis on the reticle is represented by T(H), a distance between the entrance pupil position of the projection optical system determined by the incoming rays (chief ray) from the height H from the optical axis on the reticle (designated hereinafter as the object height H) and the reticle is represented by E(H), then T(H) and E(H) are related by

    T(H)=H/E(H)                                                (1).

Therefore, in order to obtain constantly uniform telecentricity for the purpose of making the influence upon the image distortion uniform independently of the object height H, it would be sufficient to change the entrance pupil position of the projection optical system so as to be proportionate to the object height H. In other words, by placing the entrance pupil position of the projection optical system at the time when the object height H is low closer to the object side (reticle side) than the entrance pupil position at the time when the object height H is high, it will become possible to make an influence upon the image distortion uniform.

Therefore, in the present invention, the fact that a degree of the influence upon the image distortion of the entrance pupil position of the optical system also varies depending on the height of the object is being paid attention to, although generally the entrance pupil position of the optical system varies depending on the object height, and by balancing the entrance pupil positions according to the height of the object height H (the height from the optical axis on the reticle), it is made possible to make the influence upon the image distortion on the entire object plane (the entire lens plane) uniform.

Condition (I), as shown below, provides for an optimal ratio of the focal length of the projection optical system F and an imagery magnification of the projection optical system B multiplied by the distance between the object and the image L (the distance between the reticle and the wafer).

    1.8≦|F/(B·L)                      (I)

This condition (I) connotes that it will be equivalent as providing for the ratio of the distance from the object plane (reticle plane) to the paraxial entrance pupil of the projection optical system E and the distance between the object and the image L (the distance from the reticle to the wafer), supposing the paraxial exit pupil position of the projection optical system on the image side (wafer side) (the exit pupil position of the projection optical system determined by the paraxial ray) is at infinity .

To describe it concretely, as shown in FIG. 1, the primary focal point of the entire projection optical system f (a focal point on the reticle side) corresponds to the paraxial entrance pupil position supposing the paraxial exit pupil position of the projection optical system is at infinity, and if the focal length of the entire projection optical system is, when h represents a primary principle plane of the projection optical system, represented by F, the projection magnification of the projection optical system is represented by B, the distance from the object plane (reticle plane) to the primary focal point of the entire projection optical system f is represented by E, then according to a lateral magnification equation, the following relation should be established.

    B=F/E                                                      (2)

And transforming the above mentioned Eq. (2) yields

    E=F/B                                                      (3)

and dividing the both sides of Eq. (3) by the distance between the object and the image L (the distance between the reticle and the wafer), and taking its absolute value finally derives Eq. (4) with regard to the above mentioned Condition (I) .

    |E/L|=|F/(B·L)|(4)

From the above, it can be understood that Condition (I) provides for the absolute value of the optimal ratio of the distance from the object plane (reticle plane) to the paraxial entrance pupil E and the distance between the object and the image L (the distance between the reticle and the wafer), supposing the paraxial exit pupil position of the projection optical system on the image side (wafer side) is at infinity.

When going below the lowest limit of Condition (I), the entrance pupil position of the projection optical system becomes too close compared to the distance between the object and the image L (the distance between the reticle and the wafer) and the telecentricity over the entire object plane (entire reticle plane) will aggravate, and thus balancing and correcting it will become difficult.

Furthermore, in order to avoid complication of the structure of the projection optical system, it is desirable to make the ceiling value of Condition (I) as 6 as in |F/(B·L)|≧6. When the value of Condition (I) exceeds 6, a deviation of the entrance pupil position by the allowed entrance height (the object height H) becomes small, and the degree of freedom in terms of designing to balance the entrance pupil position of the projection optical system determined by the incoming rays from the object height H (the height H from the optical axis on the reticle) becomes too small. Hence, it becomes necessary to keep the entrance pupil position of the projection optical system farther away over the entire object plane (the reticle plane) more than necessary, and as a result, it becomes inevitable that the projection optical system should be composed of more number of lenses and accordingly to grow the size of the projection optical system and to complicate thereof.

Also, Condition (I) provides for the optimal paraxial entrance pupil position (the exist pupil position of the projection optical system determined by the paraxial ray) of the projection optical system, supposing the paraxial exit pupil position of the projection optical system on the image side (wafer side) is at infinity, but it also simultaneously takes the optimal exit pupil position of the projection optical system into consideration.

To describe it concretely, supposing the paraxial entrance pupil position of the projection optical system on the object side (reticle side) is at infinity, if the distance from the paraxial exit pupil position of this projection optical system to the image field (wafer plane) is represented by E', then according to a lateral magnification equation, the following equation will hold.

    1/B=F/E'                                                   (5)

And transforming Eq. (5) derives the following Eq. (6).

    E'=F·B=(F/B)·B.sup.2                     (6)

Using the above mentioned Eq. (3), a further transformation of the above mentioned Eq. (6) derives the following Eq. (7).

    E'=E·B.sup.2                                      (7)

This Eq. (7) is equivalent to Eq. (3) multiplied by the square 2 of the projection magnification B (B²) of the projection optical system, and dividing the both sides of the above mentioned Eq. (7) by the distance between the object and the image L (the distance between the reticle and the wafer) and taking its absolute value derive the following Eq. (8).

    |F·B/L|=| F/(B·L)!|.multidot.B.sup.2                                            (8)

This Eq. (8) is equivalent to the above mentioned Eq. (4) with regard to Condition (I) multiplied by the square of the projection magnification of the projection optical system B(B²), and applying the above to the aforementioned Condition (I) yields the following (9).

    1.8·B.sup.2 ≦|F/(B·L)|·B.sup.2 (9)

Therefore, Condition (I) provides for the optimal paraxial entrance pupil position of the projection optical system, supposing the paraxial exit pupil position of the projection optical system is at infinity, and simultaneously, by considering the amount of the entire Condition (I) multiplied by B², it can be understood that it also provides for the paraxial exit pupil position, supposing the paraxial entrance pupil position of the projection optical system is at infinity.

Therefore, the paraxial exit pupil position of the projection optical system on the image side (wafer side) as well as the paraxial entrance pupil position of the projection optical system on the object side (reticle side) do not necessarily have to be at infinity, and as long as it is within the range of Condition (I), it can be understood that it is possible to well-proportionately maintain the telecentricity on both the image side (wafer side) and the object side (reticle side).

Condition (II) provides for, as shown below, an optimal distance d₀ from the object plane (reticle plane) to the lens surface which is closest to the object side in the first group of lenses of the projection optical system for the distance between the object and image L (the distance between the reticle and the wafer).

    d.sub.0 /L≦0.2                                      (II)

Although it is possible to place the entrance pupil position of the projection optical system farther and make the object plane (reticle plane) telecentric by leaving a long distance between the object plane (reticle plane) and the lens surface which is closest to the object side in the first group of lenses d₀, the ratio of the distance d₀ to the distance between the object and the image L (the distance from the reticle to the wafer) becomes larger, if the distance d₀ is increased beyond the upper limit of Condition (II). Accordingly, in order to obtain the desired optical performance, since spaces between the lenses and optical members such as reflectors which comprise the projection optical system do not vary significantly, the projection optical system as a whole becomes longer in its length, and keeping the projection optical system compact becomes difficult to realize.

Also, Condition (III), in the case where it basically comprises, viewed from the first object side, in order of succession, the first group of lenses with positive refractive power G₁, the second group of lenses virtually consists of afocal system G₂, and the third group of lenses with positive refractive power G₃, provides for, as shown in the following, the optimal ratio of the focal length f₁ of the first group of lenses G₁ and the focal length f₃ of the third group of lenses G₃.

    0.80≦f.sub.3 /f.sub.1 ≦1.5                   (III)

This Condition (III) is for the purpose of attaining the projection optical system with high resolution realizing a high numerical aperture NA while maintaining a large exposure area. In explaining Condition (III) in the following, a basic configuration of the projection optical system according to the present invention will be studied.

As shown in FIG. 2, the projection optical system according to the present invention basically comprises, viewed from the object side (reticle side), in order of succession, the first group of lenses with positive refractive power G₁, the second group of lenses consists of the afocal system G₂, and the third group of lenses with positive refractive power G₃.

Furthermore in FIG. 2, a ray shown in a solid line from the position where the object height H on the object (reticle) is zero (a position where the reticle and the optical axis of the projection optical system intersect) connotes the paraxial marginal ray from the axial object point (the center of the object), and a ray shown in a dash from the position of the object height H (the height of the object H from the optical axis) connotes the paraxial marginal ray from an off-axis object point. Provided that what is designated as the paraxial marginal ray in the present invention is the most peripheral (outer) incoming ray which was found by the paraxial ray tracing when a ray emerged from an object point with a certain divergence angle enters the optical system.

In order to attain the projection optical system with high resolution while maintaining the compactness thereof as well as the large exposure area based on the above mentioned lens configuration, it is necessary to well-proportionately correct the angle of view or aberrations due to the object height (the image field curvature, astigmatic aberration, coma aberration, and aberration due to off-axis rays such as distorted aberration) and the aberration related to the numerical aperture NA on the image side of the projection optical system, namely, aberration related to resolution (aberration due to the axial rays such as spherical aberration).

For that purpose, as shown in FIG. 3, it is preferable to maintain the ratio of a numerical aperture NA_(a) on the object side (reticle side) in the first group of lenses G₁ and NA_(d) related to the exit pupil from the second group of lenses G₂, and the ratio of a numerical aperture NA_(b) on the image side (wafer side) in the third group of lenses G₃ and a numerical aperture NA_(c) related to the entrance pupil to the second group of lenses, G₂ nearly equal.

This connotes equalizing the load against the NA_(a) on the object side in the first group of lenses G₁ and the numerical aperture NA related to the entrance pupil to the second group of lenses G₂ in correcting aberration of the projection optical system, and the load against the numerical aperture NA on the image side (wafer side) in the third group of lenses G₃ and the numerical aperture NA related to the exist pupil to the second group of lenses G₂ in correcting aberration of the projection optical system.

Enciphering the above mentioned yields the following Eq. (10) and (11).

    NA.sub.a :NA.sub.d =NA.sub.b :NA.sub.c                     (10)

    NA.sub.a ×NA.sub.c =NA.sub.b ×NA.sub.d         (11)

Therefore, if the projection magnification of the projection optical system is represented by B, the focal length of the first group of lenses G₁ is represented by f₁, the focal length of the third group of lenses G₃ is represented by f₃, a maximum object height (e.g., a half the length of the diagonal line in the available pattern region on the reticle) from the optical axis of the projection optical system is represented by H_(MAX), then the above mentioned equation can be transformed into the following Eq. (12).

    (NA.sub.b ·B)×(H.sub.MAX /f.sub.1)=NA.sub.b ×(H.sub.MAX ·B/f.sub.3)                    (12)

Furthermore, transforming the above mentioned Eq. (12) eventually derives the following Eq. (13).

    f.sub.1 =f.sub.3                                           (13)

From the above mentioned Eq. (13), by equalizing the focal length f₁ of the first group of lenses G₁ and the focal length f₃ of the third group of lenses G₃, it can be understood that it is possible to well-proportionately correct the aberration due to the angle of view (image field curvature, astigmatic aberration, coma aberration as well as distorted aberration) and the aberration (spherical aberration) related to the resolution (the numerical aperture on the image side of the projection optical system), and attain the projection optical system with high resolution and a high numerical aperture on the image side while maintaining a large exposure area.

Thus, in order to maintain the balance of various aberrations and the wide exposure area, it is ideal to satisfy the above mentioned Eq. (13), however, in reality, it is sufficient to satisfy the range of the above mentioned Condition (III).

When going below the lower limit of Condition (III), however, if the focal length f₁ of the first group of lenses G₁ is fixed, then the focal length f₃ of the third group of lenses G₃ becomes shorter, and the numerical aperture NA with regard to the exit pupil of the projection optical system becomes large. As a result, it will become difficult to correct the aberration due to the angle of view (image field curvature, astigmatic aberration, coma aberration and the distorted aberration ) well while correcting the aberration (spherical aberration) related to resolution (the numerical aperture on the image side of the projection optical system) and increasing the numerical aperture on the image side (wafer side), and it will become impossible to obtain an excellent image formation performance. On the contrary, if the focal length f₃ of the third group of lenses G₃ is fixed, then the focal length f₁ of the first group of lenses G₁ will become longer, and although it will be relatively easier to correct the aberration (spherical aberration ) related to the resolution (the numerical aperture on the image side of the projection optical system) and the aberration due to the angle of view (image field curvature, astigmatic aberration, coma aberration and distorted aberration), the distance from the object plane (reticle plane) to the first lens surface of the projection optical system d₀, will become longer. Owing to this, not only the overall length of the projection optical system but also the diameter of the lens will become longer, and it will become extremely difficult to attempt to keep the projection optical system compact. When surpassing the upper limit of Condition (III), if the focal length f₁ of the first group of lenses G₁ is fixed, then the focal length f₃ of the third group of lenses G₃ becomes longer, and although it will become relatively easier to correct the aberration (spherical aberration) related to resolution (NA on the image side of the projection optical system) and the aberration due to the angle of view (the image filed curvature, astigmatic aberration, coma aberration and the distorted aberration), the distance from the last lens surface of the projection optical system to the image field (wafer plane) will become longer. Owing to this, the overall length of the projection optical length as well as the diameter of the lenses will become longer, and it will become impossible to attempt to make the projection optical system compact. On the contrary, if the focal length f₃ of the third group of lenses G₃ is fixed, then the focal length f₁ of the first group of lenses G₁ will become shorter, and the numerical aperture NA with regard to the entrance pupil of the projection optical system will become larger, and it will become difficult to better the aberration due to the angle of view (image field curvature, astigmatic aberration, coma aberration and distorted aberration), and as a result, the excellent image formation performance cannot be obtained. Furthermore, in order to obtain more preferable image formation performance while keeping the projection optical system more compact, it is desirable to define f₃ /f₁ ≦1.2 with the upper limit of Condition (III) being 1.2.

Also, in order to materialize a further compact system sufficiently, it is preferable to further satisfy the following Condition (IV) besides the above mentioned conditional equations (I)˜(III).

    0.05≦f.sub.1 /L≦0.3                          (IV)

This is provided that f₁ represents the focal length of the first group of lenses G₁ and L represents the distance between the first object (reticle) and the second object (wafer) (the distance between the object and the image).

Condition (IV) warrants to shorten the entire length of the projection optical system by providing for the optimal ratio of the focal length f₁ of the first group of lenses G₁ and the distance between the object and the image L.

When going below the lower limit of Condition (IV), because the power (refractive power) of the first group of lenses G₁ becomes too strong for the distance between the object and the image L, it will become difficult to correct various aberrations. On the contrary, when surpassing the upper limit of Condition (IV), since the overall length of the projection optical system becomes longer, it will become difficult to keep the projection optical system compact.

Also, in order to shorten the overall length of the projection optical system sufficiently, it is desirable to satisfy the following Condition (V).

    0.04≦H.sub.MAX /L≦0.2                        (V)

Provided that H_(MAX) expresses the maximum object height (a half length of the diagonal line within the available pattern region on the reticle) from the optical axis of the projection optical system on the first object (reticle), and L expresses the distance between the first object (reticle) and the second object (wafer) (the distance between the object and the image).

Condition (V) is to provide for the optimal ratio of the distance between the object and the image L, for the maximum object height H_(MAX). Even though the value of the above mentioned Condition (II) are fixed, if the distance between the object and the image L against the maximum object height H_(MAX) becomes longer, going below the lower limit of Condition (V), because the overall length of the projection optical system becomes too long, it will become impossible to attempt to keep the system compact. On the contrary, surpassing the upper limit of Condition (V) makes it difficult to correct various aberrations over the entire image formation field (the entire wafer surface) well.

Furthermore, in order to correct the various aberrations proportionately while maintaining the degree of freedom in correcting various aberrations, it is desirable that the first group of lenses G₁ comprises at least 2 or more positive lenses, the second group of lenses G₂ comprises at least 4 or more negative lenses and at least 4 or more positive lenses, and the third group of lenses G₃ comprises at least 2 or more positive lenses.

So far, the projection optical system based on the groups of lenses comprising, viewed from the object side (reticle side), in order of succession, the first group of lenses G₁ with positive refractive power, the second group of lenses G₂ consists of afocal systems, and the third group of lenses G₃ with positive refractive power, has been described, and in order to keep the overall size of the projection optical system compact based on the configuration of the second group of lenses, G₂, and further to correct the image field curvature well, it is desirable to make it composed of, as shown in FIG. 2 and FIG. 3, viewed from the object side (reticle side), in order of succession, at least a first group of sub lenses with negative refractive power, G₂₁, a second group of sub lenses with positive refractive power G₂₂, and a third group of sub lenses with negative refractive power G₂₃.

First of all, the negative first group of sub lenses G₂₁ in this second group of lenses G₂ and the positive second group of sub lenses G₂₂ place a main point on the image side (wafer side) and shorten the distance from the object plane (reticle plane) to the projection optical system, and thus shorten the overall length of the projection optical system in order to form the reverse-Galileo system (or retro-focus system). Also, the third group of sub lenses G₂₃ in the second group of lenses G₂ smoothes the image field by satisfactorily correcting the image field curvature in order to contribute mainly to the correction of Petzval sum.

Furthermore, because there is a danger that the entrance pupil of the projection optical system comes closer to the object plane (reticle plane) due to the configuration of the above mentioned first group of sub lenses G₂₁ and the second group of sub lenses G₂₂, it is desirable, in this case, to match the secondary focal point (the image side or the wafer side) of the positive first group of lenses G₁ with the entrance pupil position of the projection optical system at approximately the same time thereof, and by doing so, it is possible to place the entrance pupil position of the projection optical system farther from the object plane (reticle plane) while keeping the overall length of the projection optical system short.

In order to have the second group of lenses G₂ function to correct aberration satisfactorily while keeping the system compact enough, based on the basic configuration of the above mentioned second group of lenses G₂, if the focal length of the first group of sub lenses G₂₁ is represented by f₂₁, the focal length of the second group of sub lenses G₂₂ is represented by f₂₂, and the focal length of the third group of the sub lenses G₃ is represented by f₂₃, then it is desirable to further satisfy the following conditional Eqs. (VI) and (VII).

    1.5≦|f.sub.22 /f.sub.21 |≦5 (VI)

    0.02≦|f.sub.23 /L|≦0.10    (VII)

Condition (VI) corresponds to giving the optimal magnification for the first group of sub lenses G₂₁ that comprises the reverse Galileo system (or retro focus system) and the second group of sub lenses G₂₂, and it is a condition to keep the overall length of the projection optical system compact. Going below the lower limit of Condition (IV) makes it difficult to keep the projection optical system compact. Furthermore, in order to satisfactorily keep the system compact, supposing the lower limit value of Condition (VI) is 1.7, then it is desirable if 1.7≦|f₂₂ /f₂₁ |. On the contrary, surpassing the upper limit of Condition (VI) causes the focal length f₂₁ of the first group of sub lenses G₂₁ to become short, and it will become extremely difficult to correct various aberrations, and even if the focal length f₂₁ of the first group of sub lenses G₂₁ is fixed, the focal length f₂₂ of the second group of sub lenses G₂₂ will become longer, and the system will not be compact enough.

Also, Condition (VII) is a condition to have the third group of lenses G₂₃ function to correct Petzval sum satisfactorily. Going below the lower limit of Condition (VII) causes the focal length f₂₃ of the third group of sub lenses G₂₃ to become too short, and it will become difficult to correct various aberrations, and on the contrary, surpassing the upper limit of Condition (VII) causes the Petzval sum to be corrected insufficiently, and it will become difficult to smooth the image field.

Furthermore, it was previously described to the effect that, in order to correct various aberrations while maintaining a degree of freedom in correcting the various aberrations, it is preferable to have such a configuration where the second group of lenses G₁ has at least 4 or more negative lenses and at least 4 or more positive lenses, and a more preferable configuration of the second group of lenses G₂ comprises the first group of sub lenses G₂₁ with at least 2 or more negative lenses and the second group of sub lenses G₂₂ with at least 4 or more positive lenses, and the third group of sub lenses G₂₃ with at least 2 or more negative lenses.

What is furthermore preferable would be that at least 2 positive lenses out of 4 or more positive lenses in the second group of sub lenses G₂₂ are biconvex lenses.

Incidentally, although the second group of lenses G₂ according to the present invention composes an afocal system, it does not necessarily have to be the perfect afocal system.

Hence to be concrete, when the paraxial marginal ray is traced, with the position where the object height H on the object (reticle) is zero (the position where the reticle and the optical axis of the projection optical system intersect) as the axial object point, in the region closest to the object side (reticle side) where the variation of the angle of the slope of the paraxial marginal ray initially becomes small, if the point between the lenses where the angle of the slope of the paraxial marginal ray becomes either zero or closest to zero is designated as a boundary between the first group of lenses G₁ and the second group of lenses G₂, and in the region closest to the image side (wafer side) where the variation of the angle of the slope of the paraxial marginal ray finally becomes small, if the point between the lenses where the angle of the slope of the paraxial marginal ray becomes either zero or closest to zero is designated as a boundary between the second group of lenses G₂ and the third group of lenses G₃, then the second group of lenses G₂ in that case will be included in the definition of the afocal system connoted by the present invention.

Therefore, in order to make it easier to understand the afocal system of the second group of the lenses G₂ connoted by the present invention, the division of the first group of lens G₁ ˜ the third group of lenses G₃ will be explained in reference to FIG. 4˜FIG. 7. FIGS. 4 and 5 qualitatively show the optical path of the paraxial marginal ray at the time when the paraxial marginal ray is traced in the region (a₁, a₂) closest to the object side where the variation of the angle of the slope of the paraxial marginal ray initially becomes small, and FIGS. 6 and 7 qualitatively show the optical path of the paraxial marginal ray in the region (b₁, b₂) closest to the image side (wafer side) (b₁, b₂) where the variation of the angle of the slope of the paraxial marginal ray finally becomes small. This is provided that the points plotted in the optical path of the paraxial marginal lay in FIGS. 4˜7 connote the position at each of the surfaces of the lenses in the projection optical system where the paraxial marginal ray from the optical axis Ax passes through.

First of all, FIG. 4 shows the slope of the paraxial marginal ray at or near the position where the paraxial marginal ray passes through each of the lenses of the projection optical system, initially showing a peak value, when the region a₁ where the variation of the angle of the slope of the paraxial marginal ray becomes small, is included. In this case, it is preferable if the boundary between the first group of lenses G₁ and the second group of lenses G₂ is at a position in the space between lenses d_(a1) where the angle of the slope of the paraxial marginal ray is either zero or closest to zero in the region a₁.

FIG. 5 shows the slope of the paraxial marginal ray when the angle of the slope of the paraxial marginal ray is in its tendency to increase in the condition where the region a₂ where the variation of the angle of the slope of the paraxial marginal ray entering into each of the lenses of the projection optical system initially becomes small is included in the region close to the object side (reticle side) of the projection optical system. In this case, it is preferable if the boundary between the first group of lenses G₁ and the second group of lenses G₂ is at a position in the space between lenses d_(a2) where the angle of the slope of the paraxial marginal ray is either zero or close to zero in the region a₂.

FIG. 6 shows the slope of the paraxial marginal ray when the region b₁ where the variation of the angle of the slope of the paraxial marginal ray becomes small is included, at or near the position where the paraxial marginal ray enters into an each of the lenses of the projection optical system, lastly showing a peak value. In this case, it is preferable if the boundary between the second group of lenses G₂ and the third group of lenses G₃ is a position d_(b1) between the lenses where the angle of the slope of the paraxial marginal ray becomes either zero or closest to zero in the region b₁.

FIG. 7 shows the slope of the paraxial marginal ray when the angle of the slope of the paraxial marginal ray is in its tendency to decrease in the condition where the region b₂ where the variation of the angle of the slope of the paraxial marginal ray entering an each of the lenses of the projection optical system lastly becomes small is included. In this case, it is preferable if the boundary between the second group of lenses G₂ and the third group of lenses G₃ is at a position d_(b2) between the lenses where the angle of the slope of the paraxial marginal ray becomes either zero or closest to zero.

In order to have the second group of lenses G₂ function as afocal system sufficiently based on the above mentioned lens configurations of the first group of lenses G₁ ˜ the third group of lenses G₃, if the angle of incidence of the paraxial marginal ray as the paraxial marginal ray from the axial object point on the object (reticle) enters the first group of lenses G₁ is represented by u₁, the angle of incidence of the paraxial marginal ray when the paraxial marginal ray from the axial object point on the object (reticle) enters the second group of lenses G₂ is represented by u₂ ', the angle of emergence of the paraxial marginal ray when the paraxial marginal ray from the axial object point on the object (reticle) emerges from the second group of lenses G₂ is represented by u₃ ', then it is desirable to satisfy the following equations.

    |u.sub.2 /u.sub.1 |≦0.5           (VIII)

    |u.sub.2 '/u.sub.3 '|≦0.5         (IX)

Unless Conditions (VII) and (IX) are satisfied, it will become difficult to correct the aberrations due to the angle of view (image field curvature, astigmatic aberration, coma aberration and distorted aberration) and the aberrations related to the numerical aperture NA on the image side of the projection optical system (spherical aberration) well-proportionately, and it will be impossible to realize the kind of the projection optical system of which the present invention designated as its objective.

Furthermore, in order to have the second group of lenses G₂ function sufficiently as an afocal system, if the focal length of the first group of the lenses G₁ is represented by f₁, the focal length of the second group of lenses G₂ is represented by f₂, and the focal length of the third group of lenses G₃ is represented by f₃, then it is furthermore desirable to satisfy

    |f.sub.2 |>f.sub.1                       (X)

    |f.sub.2 |>f.sub.3                       (XI).

Unless Condition (X) is satisfied, it will be impossible to make the object side (reticle side) in the first group of the reticle G₁ telecentric, and the kind of the projection optical system of which the present invention designated as its objective cannot be attained.

Also, in the case when the focal length of the second group of lenses G₂ is negative, deviating from the relation of Condition (XI), the paraxial marginal ray which emerges from the second group of lenses G₂ will diverge. Because of this, the numerical aperture NA on the image side (wafer side) of the projection optical system becomes smaller, and it will become difficult to realize the projection optical system with high resolution. And the attempt to secure the numerical aperture NA on the image side (wafer side) of the projection optical system will increase the lens diameter of the third group of the lenses G₃, and it will be difficult to keep the system compact. Also, when the focal length of the second group of lenses becomes positive, deviating from the relationship of Condition (XI), although it is possible to secure the numerical aperture NA on the image side (wafer side) of the projection optical system, it will become impossible to secure the distance (back focus) between the projection optical system and the image field (wafer plane), and thus it is not preferable. Because of this, an attempt to secure the distance (back focus) between the projection optical system and the image field (wafer surface) brings an increase in the lens diameter of the second group of the lenses G₂, and thus the system cannot be kept compact.

Furthermore, as it was described before, it is preferable that the second group of the lenses G₂ comprises viewed from the object side (reticle side), in order of succession, at least the first group of sub lenses with negative refractive power G₂₁, the second group of sub lenses with positive refractive power G₂₂, and the third group of sub lenses with negative refractive power G₂₃, but as shown in FIG. 2 and 3, it is also acceptable to place the fourth group of sub lenses with positive refractive power G₂₄ on the image side of the third group of sub lenses with negative refractive power G₂₃. By doing so, because it will be made possible to share the load with the fourth group of sub lenses G₂₄ in correcting spherical aberration in the third group of lenses G₃ which is greatly related to the correction of spherical aberration for the purpose of increasing the numerical aperture NA on the image side (wafer side) of the projection optical system, a well-balanced correction of the spherical aberration can be attained. At that time, the first group of sub lenses G₂₁ and the second group of sub lenses G₂₂ compose the reverse Galileo system or retro-focus system, and the third group of sub lenses G₂₃ and the fourth group of sub lenses G₂₄ compose the reverse Galileo system or retro focus system. Therefore, since the second group of lenses G₂ comes to have two optical systems (reverse Galileo system or retro focus system) which contribute to keep the projection optical system compact, the addition of the fourth group of lenses G₂₄ does not virtually cause the size of the projection optical system to grow.

Furthermore, even in the case where the second group of lenses G₂ has four groups of sub lenses, it is needless to say that the above mentioned Conditions (I)˜(XI) can be applied, and furthermore, when the fourth group of sub lenses G₂₄ is placed in the second group of lenses, it is more preferable that the composition comprises at least two or more positive lenses in order to accomplish a satisfactory correction of spherical aberration.

Also, in the case where the second group of lenses G₂ comprises, viewed from the object side (reticle side), in order of succession, only the first group of sub lenses with negative refractive power G₂₁, the second group of sub lenses with positive refractive power G₂ and the third group of sub lenses with negative refractive power G₃, it is possible to make the ray emerging from the third group of lenses G₂₁ an almost parallel pencil of ray by making the ray emerging from the second group of lenses G₂₃ rather convergent. In this case, the application of the above mentioned Conditions (I)˜(IX) is also possible. Accordingly, the lens composition of the fourth group of sub lenses G₂₄ is not essential in concretely composing the second group of lenses.

In the following, embodiments according to the present invention will be described in detail. The projection optical system in this embodiment is what is applied to the projection exposure apparatus shown in FIG. 8.

First of all, to explain FIG. 8 briefly, as shown in the figure, on the object plane of the projection optical system PL, a reticle R as an original edition for projection on which the fixed integrated circuit pattern is formed, is placed, and a wafer W as a substrate is placed on the image field of the projection optical system PL. The reticle R is held by a reticle stage RS, and the wafer W is held by a wafer stage WS. Also, an illumination optical apparatus IS is installed above the reticle R in order to illuminate the reticle R evenly.

The light supplied from the illumination optical system IS according to the above mentioned configuration illuminates the reticle R, and the image formed by the light source in the illumination optical system IS is at the pupil position (aperture stop AS position ) of the projection optical system PL, and thus so-called Koehler illumination is provided. And the pattern on the reticle R which is Koehler illuminated by the projection optical system PL will be exposed (printed) onto the wafer W by the projection optical system PL.

The present invention shows an example of the projection optical system which uses excimer laser which supplies the light with 248 nm exposure wavelength λ as a light source, which is installed inside the illumination optical system IS, and FIGS. 9˜11 show the configuration of the lenses of the projection optical system of the 1st˜3rd embodiments.

As shown in FIGS. 9˜11, the projection optical system in each of the embodiments has, viewed from the object side (reticle side), in order of succession, the first group of lenses with positive refractive power G₁, the second group of lenses consists of afocal systems G₂, and the third group of lenses with positive refractive power G₃, and the second group of lenses G₂ has, viewed from the object side (reticle side), in order of succession, the first group of sub lenses with negative refractive power G₂₁, the second group of sub lenses with positive refractive power G₂₂, the third group of sub lenses with negative refractive power G₂₃, and the fourth group of sub lenses with positive refractive power G₂₄, and it is telecentric on the object side (reticle side) as well as on the image side (wafer side).

First of all, the projection optical system as in the first embodiment shown in FIG. 9 has a spec. which stipulates that the distance between the object and image L (the distance from the object plane to image field, or the distance from the reticle R to the wafer W) is 1000, the numerical aperture NA on the image side is 0.56, the projection magnification B is 1/4, and the diameter of the exposure area over the wafer W is 24.4.

To explain the concrete lens configuration of the first embodiment, as shown in FIG. 9, the first group of lens with positive refractive power G₁ comprises, viewed from the object side, in order of succession, a positive meniscus lens with its convex facing the image side L₁₁ and a biconvex positive lens L₁₂, and the first group of sub lenses G₂₁ in the second group of lenses G₂ comprises, viewed from the object side, in order of succession, a negative meniscus lens with its stronger curvature facing the image side L₂₁₁, the negative biconcave lens L₂₁₂, a negative lens with its stronger curvature facing the image side L₂₁₃, and a negative lens with its stronger curvature facing the object side L₂₁₄. And the second group of sub lenses G₂₂ in the second group of lenses G₂ comprises, viewed from the object side, in order of succession, a positive lens with its stronger curvature facing the image side L₂₂₁, three positive biconcave lenses (L₂₂₂ ˜L₂₂₄), and a positive meniscus lens with its convex facing the object side, L₂₂₅, and the third group of sub lenses G₂₃ in the second group of lenses G₂ comprises, viewed from the object side, in order of succession, a negative lens with its stronger curvature facing the image side L₂₃₁, a negative biconcave lens L₂₃₂, and a negative lens with its stronger curvature facing the object side L₂₃₃. The fourth group of the sub lenses G₂₄ in the second group of the lenses, G₂ comprises, viewed from the object side, in order of succession, two positive lenses with their concave facing the image side (L₂₄₁, L₂₄₂) and a positive biconcave lens L₂₄₃, and the third group of lenses G₃ comprises, viewed from the object side, in order of succession, two positive lenses with their concave facing the object side (L₃₁,L₃₂), a negative meniscus lens with its concave facing the object side L₃₃, and a positive lens with its concave facing the object side L₃₄.

Next, the projection optical system in the second embodiment, shown in FIG. 10, has a spec. that stipulates that the distance between the object and the image L is 1000, the numerical aperture NA on the image side is 0.57, the projection magnification B is 1/4, and the diameter of the exposure area on the wafer W is 26.0.

A concrete lens configuration of the second embodiment is, as shown in FIG. 10, basically the same as that of the first embodiment shown previously in FIG. 9.

Also, the projection optical system in the third embodiment shown in FIG. 11 has a spec. that stipulates that the distance between the object and the image L is 1000, the numerical aperture NA on the image side is 0.61, the projection magnification B is 1/4, and the diameter of the exposure area on the wafer W is 24.2.

A concrete lens configuration of the third embodiment is, as shown in FIG. 11, similar to the aforementioned first embodiment, but different in its lens configuration of the first group of sub lenses G₂₁ in the second group of lenses G₂.

In other words, in the first as well as the second embodiments, the first group of sub lenses G₂₁ comprises 4 negative lenses, but in the third embodiment shown in FIG. 11, the first group of sub lenses G₂₁ comprises three negative lenses.

Hence to be concrete, the first group of sub lenses G₂₁ in the third embodiment comprises, viewed from the object side, in order of succession, a negative meniscus lens with its convex facing the object side L₂₁₁, a negative biconcave lens L₂₁₂, and a negative lens with its stronger curvature facing the object side L₂₁₃. Now, in the following, various values of each of embodiments and the numeric values corresponding to Conditions according to the present invention will be listed.

This is provided that the numbers on the left express the order of succession from the object side (lens side), r expresses a curvature radius of the lens surface, d expresses the space between the lenses, n expresses a refractive index of soluble silica SiO₂ when the exposure wavelength λ is 248 nm, d₀ expresses the distance from the object (reticle) to the lens surface (the first lens surface) closest to the object side (reticle side) in the first group of lenses G₁, B expresses the projection magnification ratio of the projection optical system, NA is a numerical aperture on the image side of the projection optical system, F is the focal length of the entire system, L expresses the distance between the object and the image from the object plane (reticle plane) to the image field (wafer side), f₁ expresses the focal length of the first group of lenses G₁, f₂ expresses the focal length of the second group of lenses G₂, f₃ expresses the focal length of the third group of lenses G₃, H expresses the maximum height of the object from the optical axis of the projection optical system, f₂₁ expresses the focal length of the first group of sub lenses G₂₁, f₂₂ expresses the focal length of the second group of sub lenses G₂₂, f₂₃ expresses the focal length of the third group of sub lenses, G₂₃, u₁ expresses the angle of incident of the paraxial marginal ray as the paraxial marginal ray from the axial object point (reticle center) enters the first group of the lenses G₁ on the object (reticle), u₂ expresses the angle of incident of the paraxial marginal ray as the paraxial marginal ray from the axial object point (reticle center) enters the second group of the lenses G₂ on the object (reticle), u₂ ' expresses the angle of emergence of the paraxial marginal ray as the paraxial marginal ray from the axial object point (reticle center) emerges from the second group of the lenses G₂ on the object (reticle), u₃ ' expresses an angle of emergence of the paraxial marginal ray as the paraxial marginal ray from the axial object point (the center of reticle) emerges from the third group of the lenses G₃ on the object (reticle).

    ______________________________________                                          The First Embodiment!                                                         r                  d       n                                                   ______________________________________                                         1      -916.3447       27.162  1.5084                                          2      -227.7329       0.905                                                   3      199.0597        36.216  1.5084                                          4      -441.3390       9.905                                                   5      403.0175        20.824  1.5084                                          6      167.8288        16.065                                                  7      -483.1057       7.130   1.5084                                          8      221.4332        28.363                                                  9      -2401.9576      11.837  1.5084                                          10     233.0070        46.017                                                  11     -84.3358        11.820  1.5084                                          12     579.7483        10.191                                                  13     4476.8220       34.877  1.5084                                          14     -161.1413       0.912                                                   15     630.7330        40.743  1.5084                                          16     -225.6397       0.905                                                   17     525.5971        27.516  1.5084                                          18     -583.4444       9.905                                                   19     424.5690        22.635  1.5084                                          20     -1400.3503      0.905                                                   21     209.4409        33.252  1.5084                                          22     817.5253        57.033                                                  23     -782.9560       8.601   1.5084                                          24     105.2749        23.807                                                  25     -197.0602       11.318  1.5084                                          28     296.2590        60.248                                                  27     -76.2987        11.634  1.5084                                          28     2351.2231       11.723                                                  29     288.0927        22.635  1.5084                                          30     -146.8438       1.357                                                   31     -5331.1673      40.743  1.5084                                          32     -150.1084       0.905                                                   33     673.7285        32.595  1.5084                                          34     -354.6255       0.905                                                   35     261.6974        32.429  1.5084                                          36     2282.5970       0.905                                                   37     169.2184        28.674  1.5084                                          38     359.4642        0.907                                                   39     111.9123        75.365  1.5084                                          40     77.9246         54.152                                                  41     48.6404         18.461  1.5084                                          42     105.9265                                                                ______________________________________                                    

d₀ =112.464, B=1/4, NA=0.56, |F/(B·L)|=4.648,

d₀ /L=0.1125, f₃ /f₁ =0.879, f₁ /L=0.1880,

H_(MAX) /L=0.0488, f₂₂ /f₂₁ =1.919, f₂₃ /L=0.0433,

|u₂ /u₁ |=0.2664, |u₂ '/u₃ '|=0.1177, |f₂ |/f₁ =1.813,

|f₂ |/f₃ =2.061

    ______________________________________                                          The Second Embodiment!                                                        r                  d       n                                                   ______________________________________                                         1      -1005.7303      27.057  1.5084                                          2      -242.3713       0.902                                                   3      198.7984        35.076  1.5084                                          4      -410.6835       0.902                                                   5      410.6569        20.743  1.5084                                          6      164.0982        16.968                                                  7      -577.3546       7.103   1.5084                                          8      220.5003        21.722                                                  9      -2299.6759      11.791  1.5084                                          10     239.8323        56.834                                                  11     -83.8660        11.774  1.5084                                          12     569.3830        9.926                                                   13     4369.6878       36.076  1.5084                                          14     -161.8797       0.908                                                   15     618.2334        46.898  1.5084                                          16     -226.6034       0.902                                                   17     517.8291        28.860  1.5084                                          18     -596.5503       0.902                                                   19     420.1730        22.547  1.5084                                          20     -1486.4541      0.902                                                   21     207.6906        33.123  1.5084                                          22     763.7778        58.329                                                  23     -749.2745       4.711   1.5084                                          24     105.2462        25.616                                                  25     -192.2109       8.636   1.5084                                          26     289.9961        61.304                                                  27     -76.3017        1.413   1.5084                                          28     2375.1095       11.543                                                  29     -293.8675       23.754  1.5084                                          30     -146.9279       1.351                                                   31     -5982.1919      38.778  1.5084                                          32     -150.0799       0.902                                                   33     668.2708        32.468  1.5084                                          34     -358.0266       0.902                                                   35     260.1426        32.303  1.5084                                          36     2254.1516       0.902                                                   37     168.4150        28.563  1.5084                                          38     356.6433        0.904                                                   39     111.6498        74.854  1.5084                                          40     76.7274         53.929                                                  41     48.9164         18.814  1.5084                                          42     110.4062                                                                ______________________________________                                    

d₀ =104.463, B=1/4, NA=0.57, |F/(B·L)|=4.173,

d₀ /L=0.1045, f₃ /f₁ =0.876, f₁ /L=0.1883,

H_(MAX) /L=0.0520, f₂₂ /f₂₁ =1.968, f₂₃ /L=0.0428,

|u₂ /u₁ |=0.3091, |u₂ '/u₃ '|=0.1226, |f₂ |/f₁ =1.708,

|f₂ |/f₃ =1.949

    ______________________________________                                          The Third Embodiment!                                                                          d     n                                                       ______________________________________                                         1      -478.1110       27.441  1.5084                                          2      -191.4998       2.232                                                   3      212.2182        32.015  1.5084                                          4      -382.9994       11.344                                                  5      406.1960        22.868  1.5084                                          6      129.7545        23.269                                                  7      -235.6398       7.011   1.5084                                          8      197.8461        41.410                                                  9      -81.2372        11.942  1.5084                                          10     615.9498        13.302                                                  11     9231.9646       35.235  1.5084                                          12     -165.4815       0.921                                                   13     777.2557        41.162  1.5084                                          14     -227.4999       0.915                                                   15     699.0862        27.441  1.5084                                          16     -520.6480       0.915                                                   17     505.6712        27.441  1.5084                                          18     -1297.3977      0.915                                                   19     208.7835        27.891  1.5084                                          20     870.4941        58.687                                                  21     -3688.2261      8.690   1.5084                                          22     108.6197        39.842                                                  23     -196.0262       11.434  1.5084                                          24     340.9139        52.565                                                  25     -76.8355        11.754  1.5084                                          26     4588.2284       12.013                                                  27     -293.0536       22.868  1.5084                                          28     -145.6555       1.371                                                   29     -3193.5700      41.162  1.5084                                          30     -152.0488       0.915                                                   31     713.1951        32.929  1.5084                                          32     -351.8000       0.915                                                   33     266.2131        32.762  1.5084                                          34     2271.3875       0.915                                                   35     170.4888        28.969  1.5084                                          36     359.6486        0.916                                                   37     111.2772        76.146  1.5084                                          38     78.0854         56.666                                                  39     48.5057         16.986  1.5084                                          40     100.4989                                                                ______________________________________                                    

d₀ =121.885, B=1/4, NA=0.61, |F/(B·L)|=3.404,

d₀ /L=0.1219, f₃ /f₁ =0.9016, f₁ /L=0.1883,

H_(MAX) /L=0.0484, f₂₂ /f₂₁ =1.851, f₂₃ /L=0.0461,

|u₂ /u₁ |=0.2035, |u₂ '/u₃ '|=0.1114, |f₂ |/f₁ =1.973,

|f₂ |/f₃ =2.188

From the above values of various elements from an each of the embodiments, it is understood that the telecentricity has been accomplished both on the object side (reticle side) and on the image side (wafer side) while maintaining a relatively large exposure area and the high numerical aperture NA of 0.55 or more, in spite of the configuration comprising relatively small number of the lenses and the compactness of the entire system. 

What is claimed is:
 1. A projection optical system that projects an image of an object in an object surface onto an image surface with a reduction magnification comprising, in light path order from said object surface:a first group of lenses with positive refractive power, said first group of lenses comprising at least two positive lenses; a second group of lenses forming an approximately afocal system, said second group of lenses comprising, in light path order from said object surface,a first subgroup of lenses with negative refractive power, said first subgroup of lenses comprising at least two negative lenses, a second subgroup of lenses with positive refractive power, said second subgroup of lenses comprising at least four positive lenses, a third subgroup of lenses with negative refractive power, said third subgroup of lenses comprising at least two negative lenses, and a fourth subgroup of lenses with positive refractive power, said fourth subgroup of lenses comprising at least two positive lenses; and a third group of lenses with positive refractive power, said third group of lenses comprising at least two positive lenses; wherein: said projection optical system has a focal length F, said projection optical system has a projection magnification B, said object surface and said image surface are separated by a distance L, a lens surface in said first group of lenses that is closest to said object surface is separated from said object surface by a distance d₀, said first group of lenses has a focal length f₁, said third group of lenses has a focal length f₃,

    1.8≦|F/(B·L)|,

    d.sub.0 /L≦0.2, and

    0.80≦|f.sub.3 /f.sub.1 |≦1.5.


2. The projection optical system of claim 1, wherein:said first group of lenses has a focal length f₁ ; and 0.05≦f₁ /L≦0.3.
 3. The projection optical system of claim 2, wherein:a maximum height of the object from the optical axis of said projection optical system on said object surface is represented by H_(MAX) ; and 0.04≦H_(MAX) /L≦0.2.
 4. The projection optical system of claim 1, wherein:said first subgroup of lenses has a focal length f₂₁ ; said second subgroup of lenses has a focal length f₂₂ ; and 1.5≦|f₂₂ /f₂₁ |≦5.
 5. The projection optical system of claim 4, wherein:said third subgroup of lenses has a focal length f₂₃ ; and 0.02≦|f₂₃ /L|≦0.10.
 6. The projection optical system of claim 1, wherein:said first subgroup of lenses has a focal length f₂₁ ; said second subgroup of lenses has a focal length f₂₂ ; and 1.7≦|f₂₂ /f₂₁ |≦5.
 7. The projection optical system of claim 1, wherein said second subgroup of lenses comprises two biconvex lenses.
 8. The projection optical system of claim 6, wherein:the paraxial marginal ray from the axial object point on said object surface enters said first group of lenses at an angle of incidence u₁ ; the paraxial marginal ray from the axial object point on said object surface enters said second group of lenses at an angle of incidence u₂ ; the paraxial marginal ray from the axial object point on said object surface emerges from said second group of lenses at an angle of emergence u₂ '; the paraxial marginal ray from the axial object point on said object surface emerges from said third group of lenses at an angle of emergence u₃ '; |u₂ /u₁ |≦0.5; and |u₂ '/u₃ '|≦0.5.
 9. The projection optical system of claim 8, wherein:said second group of lenses has a focal length f₂ ; said third group of lenses has a focal length f₃ ; |f₂ |>f₁ ; and |f₂ |>f₃.
 10. The projection optical system of claim 3, wherein:said first subgroup of lenses has a focal length f₂₁ ; said second subgroup of lenses has a focal length f₂₂ ; and 1.5≦|f₂₂ /f₂₁ |≦5.
 11. The projection optical system of claim 10, wherein:said third group of lenses has a focal length f₂₃ ; and
 0. 02≦|f₂₃ /L|≦0.10.
 12. The projection optical system of claim 11, wherein 1.7≦|f₂₂ /f₂₁ |≦5.
 13. An exposure method for exposing a predetermined pattern formed on a mask onto a substrate by using the projection optical system according to claim 1, the method comprising the steps of:illuminating the mask in said object surface with light of a predetermined exposure wavelength; and projecting an image of said pattern formed on said mask onto said substrate in said image surface through said projection optical system.
 14. The exposure method of claim 13 wherein said predetermined pattern formed on said mask is an integrated circuit pattern.
 15. An exposure method for exposing a predetermined pattern formed on a mask onto a substrate by using the projection optical system according to claim 5, the method comprising the steps of:illuminating the mask in said object surface with light of a predetermined exposure wavelength; and projecting an image of said pattern formed on said mask onto said substrate in said image surface through said projection optical system.
 16. The exposure method of claim 15 wherein said predetermined pattern formed on said mask is an integrated circuit pattern.
 17. An exposure method for exposing a predetermined pattern formed on a mask onto a substrate by using the projection optical system according to claim 9, the method comprising the steps of:illuminating the mask in said object surface with light of a predetermined exposure wavelength; and projecting an image of said pattern formed on said mask onto said substrate in said image surface through said projection optical system.
 18. The exposure method of claim 17 wherein said predetermined pattern formed on said mask is an integrated circuit pattern.
 19. An exposure method for exposing a predetermined pattern formed on a mask onto a substrate by using the projection optical system according to claim 12, the method comprising the steps of:illuminating the mask in said object surface with light of a predetermined exposure wavelength; and projecting an image of said pattern formed on said mask onto said substrate in said image surface through said projection optical system.
 20. The exposure method of claim 19 wherein said predetermined pattern formed on said mask is an integrated circuit pattern.
 21. A projection optical system that projects an image of an object in an object surface onto an image surface with a reduction magnification comprising, in light path order from said object surface:a first group of lenses with positive refractive power, said first group of lenses comprising at least two positive lenses; a second group of lenses forming an approximately afocal system, said second group of lenses comprising, in light path order from said object surface,a first subgroup of lenses with negative refractive power, said first subgroup of lenses comprising at least two negative lenses, a second subgroup of lenses with positive refractive power, said second subgroup of lenses comprising at least four positive lenses, and a third subgroup of lenses with negative refractive power, said third subgroup of lenses comprising at least two negative lenses; and a third group of lenses with positive refractive power, said third group of lenses comprising at least two positive lenses; wherein: said projection optical system has a focal length F, said projection optical system has a projection magnification B, said object surface and said image surface are separated by a distance L, a lens surface in said first group of lenses that is closest to said object surface is separated from said object surface by a distance d₀, said first group of lenses has a focal length f₁, said third group of lenses has a focal length f₃,

    1.8≦|F/(B·L)|≦6,

    d.sub.0 /L≦0.2, and

    0.80≦|f.sub.3 /f.sub.1 |≦1.5.


22. The projection optical system of claim 21, wherein:said first group of lenses has a focal length f₁ ; said third group of lenses has a focal length f₃ ; and 0.8≦f₃ /f₁ ≦1.2.
 23. The projection optical system of claim 21, wherein said first subgroup of lenses comprises:a negative lens with its stronger curvature facing the image surface side; a negative biconcave lens; and a negative lens with its stronger curvature facing the object surface side.
 24. The projection optical system of claim 23, wherein said second subgroup of lenses comprises:a positive lens with its stronger curvature facing the image surface side; at least two positive biconvex lenses; and a positive lens with its stronger curvature facing said object surface side.
 25. The projection optical system of claim 24, wherein said third subgroup of lenses comprises:a negative lens with its stronger curvature facing the image surface side; a negative biconcave lens; and a negative lens with its stronger curvature facing the object surface side.
 26. The projection optical system of claim 25, wherein:said second group of lenses further comprises, on the image surface side of said third subgroup of lenses, a fourth subgroup of lenses with positive refractive power; and said fourth subgroup of lenses comprises at least two positive lenses with their convex surfaces facing the image surface side.
 27. The projection optical system of claim 26, wherein said first group of lenses comprises:a positive lens with its stronger curvature facing the image surface side; and a positive biconvex lens.
 28. The projection optical system of claim 27, wherein said third group of lenses comprises at least three positive lenses with their convex surfaces facing the object surface side.
 29. The projection optical system of claim 21, wherein said second group of lenses has weak positive refractive power.
 30. The projection optical system of claim 21, wherein:said first group of lenses has a focal length f₁ ; and 0.05≦f₁ /L≦0.3.
 31. The projection optical system of claim 30, wherein:said first subgroup of lenses has a focal length f₂₁ ; said second subgroup of lenses has a focal length f22; and 1.5≦|f₂₂ /f₂₁ |≦5.
 32. The projection optical system of claim 31, wherein:said third subgroup of lenses has a focal length f₂₃ ; and 0.02≦|f₂₃ /L|≦0.10.
 33. The projection optical system of claim 32, wherein:the paraxial marginal ray from the axial object point on said object surface enters said first group of lenses at an angle of incidence u₁ ; the paraxial marginal ray from the axial object point on said object surface enters said second group of lenses at an angle of incidence u₂ ; the paraxial marginal ray from the axial object point on said object surface emerges from said second group of lenses at an angle of emergence u₂ '; the paraxial marginal ray from the axial object point on said object surface emerges from said third group of lenses at an angle of emergence u₃ '; |u₂ /u₁ |≦0.5; and |u₂ '/u₃ '|≦0.5.
 34. The projection optical system of claim 33, wherein:said second group of lenses has a focal length f₂ ; said third group of lenses has a focal length f₃ ; |f₂ |>f₁ ; and |f₂ |>f₃.
 35. An exposure method for exposing a predetermined pattern formed on a mask onto a substrate by using the projection optical system according to claim 31, the method comprising the steps of:illuminating the mask in said object surface with light of a predetermined exposure wavelength; and projecting an image of said pattern formed on said mask onto said substrate in said image surface through said projection optical system.
 36. The exposure method of claim 35 wherein said predetermined pattern formed on said mask is an integrated circuit pattern.
 37. An exposure method for exposing a predetermined pattern formed on a mask onto a substrate by using the projection optical system according to claim 21, the method comprising the steps of:illuminating the mask in said object surface with light of a predetermined exposure wavelength; and projecting an image of said pattern formed on said mask onto said substrate in said image surface through said projection optical system.
 38. The exposure method of claim 37 wherein said predetermined pattern formed on said mask is an integrated circuit pattern.
 39. An exposure method for exposing a predetermined pattern formed on a mask onto a substrate by using the projection optical system according to claim 26, the method comprising the steps of:illuminating the mask in said object surface with light of a predetermined exposure wavelength; and projecting an image of said pattern formed on said mask onto said substrate in said image surface through said projection optical system.
 40. The exposure method of claim 39 wherein said predetermined pattern formed on said mask is an integrated circuit pattern.
 41. A projection aligner comprising:an illumination system that illuminates a first object having an object surface on which a pattern is formed; a projection optical system which projects an image of said pattern onto an image surface on a second object; a first supporting unit that supports said first object; a second supporting unit that supports said second object; and said projection optical system comprising, in light path order from said object surface: a first group of lenses with positive refractive power, said first group of lenses comprising at least two positive lenses; a second group of lenses forming an approximately afocal system, said second group of lenses comprising, in light path order from said object surface,a first subgroup of lenses with negative refractive power, said first subgroup of lenses comprising at least two negative lenses, a second subgroup of lenses with positive refractive power, said second subgroup of lenses comprising at least four positive lenses, a third subgroup of lenses with negative refractive power, said third subgroup of lenses comprising at least two negative lenses, and a fourth subgroup of lenses with positive refractive power, said fourth subgroup of lenses comprising at least two positive lenses; and a third group of lenses with positive refractive power, said third group of lenses comprising at least two positive lenses; wherein: said projection optical system has a focal length F, said projection optical system has a projection magnification B, said object surface and said image surface are separated by a distance L, a lens surface in said first group of lenses that is closest to said object surface is separated from said object surface by a distance d₀, said first group of lenses has a focal length f₁, said third group of lenses has a focal length f₃, 1.8≦|F/(B·L)|, d₀ /L≦0.2, and 0.80≦|f₃ /f₁ |≦1.5.
 42. The projection aligner of claim 41, wherein said first subgroup of lenses comprises:a negative lens with its stronger curvature facing the image surface side; a negative biconcave lens; and a negative lens with its stronger curvature facing the object surface side.
 43. The projection aligner of claim 41, wherein the second subgroup of lenses comprises:a positive lens with its stronger curvature facing the object surface side; at least two positive biconvex lenses; and a positive lens with its stronger curvature facing the image surface side.
 44. The projection aligner of claim 41, wherein said third subgroup of lenses comprises:a negative lens with its stronger curvature facing the image surface side; a negative biconcave lens; and a negative lens with its stronger curvature facing the object surface side.
 45. The projection aligner of claim 41, wherein:said at least two positive lenses in said fourth subgroup of lenses have convex surfaces facing the image surface side.
 46. A projection aligner comprising:an illumination system that illuminates a first object having an object surface on which a pattern is formed; a projection optical system which projects an image of said pattern onto an image surface on a second object; a first supporting unit that supports said first object; a second supporting unit that supports said second object; and said projection optical system comprising, in light path order from said object surface: a first group of lenses with positive refractive power, said first group of lenses comprising at least two positive lenses; a second group of lenses forming an approximately afocal system, said second group of lenses comprising, in light path order from said object surface,a first subgroup of lenses with negative refractive power, said first subgroup of lenses comprising at least two negative lenses, a second subgroup of lenses with positive refractive power, said second subgroup of lenses comprising at least four positive lenses, and a third subgroup of lenses with negative refractive power, said third subgroup of lenses comprising at least two negative lenses; and a third group of lenses with positive refractive power, said third group of lenses comprising at least two positive lenses; wherein: said projection optical system has a focal length F, said projection optical system has a projection magnification B, said object surface and said image surface are separated by a distance L, a lens surface in said first group of lenses that is closest to said object surface is separated from said object surface by a distance d0, said first group of lenses has a focal length f1, said third group of lenses has a focal length f3,
 1. 8≦|F/(B·L)|≦6,d₀ /L≦0.2, and 0.80≦|f₃ /f₁ ≦1.5.
 47. The projection aligner of claim 46, wherein said second group of lenses further comprises, on the image surface side of said third subgroup of lenses, a fourth subgroup of lenses having positive refractive power.
 48. The projection aligner of claim 47, wherein:said fourth subgroup of lenses comprises at least two positive lenses. 